JPH0142105Y2 - - Google Patents
Info
- Publication number
- JPH0142105Y2 JPH0142105Y2 JP1986010315U JP1031586U JPH0142105Y2 JP H0142105 Y2 JPH0142105 Y2 JP H0142105Y2 JP 1986010315 U JP1986010315 U JP 1986010315U JP 1031586 U JP1031586 U JP 1031586U JP H0142105 Y2 JPH0142105 Y2 JP H0142105Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holder
- board
- movable plate
- support part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 61
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 230000000694 effects Effects 0.000 description 3
- 239000011651 chromium Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986010315U JPH0142105Y2 (en]) | 1986-01-29 | 1986-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986010315U JPH0142105Y2 (en]) | 1986-01-29 | 1986-01-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62123649U JPS62123649U (en]) | 1987-08-06 |
| JPH0142105Y2 true JPH0142105Y2 (en]) | 1989-12-11 |
Family
ID=30796492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986010315U Expired JPH0142105Y2 (en]) | 1986-01-29 | 1986-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0142105Y2 (en]) |
-
1986
- 1986-01-29 JP JP1986010315U patent/JPH0142105Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62123649U (en]) | 1987-08-06 |
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